Single transistor memory cell with reduced recombination rates

ABSTRACT

A semiconductor fabrication method includes forming a semiconductor structure including source/drain regions disposed on either side of a channel body wherein the source/drain regions include a first semiconductor material and wherein the channel body includes a migration barrier of a second semiconductor material. A gate dielectric overlies the semiconductor structure and a gate module overlies the gate dielectric. An offset in the majority carrier potential energy level between the first and second semiconductor materials creates a potential well for majority carriers in the channel body. The migration barrier may be a layer of the second semiconductor material over a first layer of the first semiconductor material and under a capping layer of the first semiconductor material. In a one dimensional migration barrier, the migration barrier extends laterally through the source/drain regions while, in a two dimensional barrier, the barrier terminates laterally at boundaries defined by the gate module.

This application is a divisional of U.S. Ser. No. 11/172,569 having thetitle of “Single Transistor Memory cell with Reduced RecombinationRates” filed on Jun. 30, 2005 and assigned to the same assignee hereof.

FIELD OF THE INVENTION

The present invention is in the field of semiconductor fabricationprocesses and, more particularly, fabrication processes for makingstorage cells.

RELATED ART

Dynamic random access memory (DRAM) is a well-known storage technologyin which a single bit of information is represented as charge stored ona capacitive element. Traditional DRAM cells employed a transistor and asmall capacitor to store the charge that differentiates a “1” from a“0.” With the advent of semiconductor on insulator (SOI) processes,single transistor, “capacitorless” DRAM cells (i.e., one transistor andno distinct capacitor) have been proposed and implemented. In these socalled 1-transistor (1T) cells, electron-hole pairs are generated in thebody of the transistor by pulsing the gate, drain, and possibly sourceterminals in a defined sequence. In the case of an NMOS transistor, asan example, it is possible to generate electron-hole pairs in thechannel body while biasing the transistor in an “ON” state. In the ONstate, the transistor includes a conductive channel adjacent theinterface between the gate dielectric and the channel body. Electronsare quickly swept out to the drain. The excess holes, on the other hand,are repelled by the positive voltage on the gate electrode and migrateaway from the gate dielectric interface. The net effect of this activityis a transient increase in the number of holes in the channel body. 1Tcells take advantage of this activity by intentionally generatingexcessive holes as a means of writing a “1” to the cell.

Unfortunately, as indicated above, the charge imbalance in the channelbody is transient and will dissipate if not “refreshed” periodically.Refreshing a DRAM, whether the cell is a conventional cell or a 1T cell,requires a dedicated operational sequence, during which all cells in theDRAM are refreshed. During a refresh operation, transient currents areincreased and the device is generally unavailable for conventional readand write operations. While the reduction in availability or bandwidthcan be at least partially compensated by appropriate buffering, thetransient currents that occur during refresh result in increased standbycurrent and increased standby power consumption. Thus, the frequencywith which a DRAM must be refreshed (referred to as the refresh period)is a measure of the potential performance of the device and the standbypower consumption of the device. Longer refresh periods are alwayspreferred to shorter refresh periods. It would be desirable, therefore,to implement a fabrication process and a device structure for increasingthe refresh period of a DRAM device and, more particularly, a 1T DRAMdevice.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention is illustrated by way of example and not limitedby the accompanying figures, in which like references indicate similarelements, and in which:

FIG. 1 is a cross sectional view of a semiconductor wafer at anintermediate stage in an integrated circuit fabrication processemphasizing the use of a potential well layer in the starting materialas a majority carrier migration barrier according to an embodiment ofthe invention;

FIG. 2 is a conceptual depiction of the energy bands associated with thewafer of FIG. 1;

FIG. 3 depicts processing subsequent to FIG. 1 in which a gatedielectric layer is formed over a semiconductor capping layer;

FIG. 4 depicts processing subsequent to FIG. 3 in which a gate module isformed over the gate dielectric layer;

FIG. 5 depicts processing subsequent to FIG. 4 in which the migrationbarrier is etched using the gate module as a mask;

FIG. 6 depicts processing subsequent to FIG. 5 in which source/drainregions are formed on either side of the migration barrier;

FIG. 7 is a partial cross sectional view of a starting material suitablefor an alternative implementation of a reduced carrier recombinationprocess emphasizing a wafer having a silicon germanium layer over aburied oxide layer;

FIG. 8 depicts processing subsequent to FIG. 7 in which the silicongermanium layer is patterned;

FIG. 9 depicts processing subsequent to FIG. 8 in which siliconstructures are formed adjacent the silicon germanium structure and asilicon capping layer is formed over the silicon and silicon germanium;

FIG. 10 depicts processing subsequent to FIG. 9 in which a gate moduleis formed and the transistor is completed;

FIG. 11 depicts an alternative to the processing sequence of FIG. 7through FIG. 10 wherein a void is formed in a silicon layer;

FIG. 12 depicts processing subsequent to FIG. 11 in which the void isfilled with silicon germanium and a silicon capping layer is depositedover the silicon and silicon germanium;

FIG. 13 depicts processing subsequent to FIG. 12 in which a gate moduleis formed;

FIG. 14 depicts a wafer for use in a vertical, double gated transistorimplementation of the reduced carrier recombination application in whicha silicon germanium layer is formed between a pair of silicon layersover an insulating layer;

FIG. 15 depicts processing subsequent to FIG. 14 in which a fin isformed from the silicon-SiGe-silicon layers;

FIG. 16 depicts processing subsequent to FIG. 15 in which a gatedielectric is formed on the fin sidewalls and gate electrode spacersformed adjacent the gate dielectric;

FIG. 17 depicts a wafer suitable for use in an embodiment emphasizingreduced biasing conditions required for programming by band-to-bandtunneling according to an embodiment of the invention wherein a reducedbandgap material is formed over a semiconductor layer;

FIG. 18 depicts processing subsequent to FIG. 17 in which a gate moduleis formed over the wafer substrate and source/drain regions formedaligned to the gate module where the reduced bandgap layer extendsthrough the source/drain regions;

FIG. 19 depicts processing according to another embodiment of thereduced bandgap method of facilitating band to band tunneling whereextension regions of a semiconductor layer are implanted with animpurity;

FIG. 20 depicts processing subsequent to FIG. 19 in which the implantedextension regions are etched away;

FIG. 21 depicts processing subsequent to FIG. 20 in which a portion ofthe extension region voids are filled with a narrow band gapsemiconductor;

FIG. 22 depicts processing subsequent to FIG. 21 in which the narrowbandgap semiconductor extension regions are implanted with an extensionimpurity;

FIG. 23 depicts processing subsequent to FIG. 22 in which a gate moduleis completed by forming spacers on the gate electrode sidewalls;

FIG. 24 depicts processing subsequent to FIG. 23 in which source/drainregions are formed aligned to the gate module.

Skilled artisans appreciate that elements in the figures are illustratedfor simplicity and clarity and have not necessarily been drawn to scale.For example, the dimensions of some of the elements in the figures maybe exaggerated relative to other elements to help improve theunderstanding of the embodiments of the present invention.

DETAILED DESCRIPTION OF THE DRAWINGS

A semiconductor fabrication process and a semiconductor device employ a1T cell that is characterized by a desirably long refresh period and lowvoltage programming. The long refresh period is achieved by providing amajority carrier migration barrier. The migration barrier is of amaterial that creates a potential well for majority carriers. Thegeometry of the migration barrier is designed to prevent or limitmajority carriers in the transistor channel body from migrating to areashaving a high density of recombination centers such as at the wafersurface and at the edges of the source/drain regions. By impedingmajority carrier migration, the rate of recombination is reduced andthereby increases the retention time of the device. For embodiments inwhich holes constitute the majority carrier in the channel body, thepotential well may be implemented using a narrow band gap semiconductorwithin the transistor channel. Silicon germanium (Si_(1-x)Ge_(x)) is anexample of such a material. When positioned in proximity to p-typesilicon, the silicon germanium creates a valence band offset by virtueof which holes in the transistor channel body will be confined and will,therefore, tend to accumulate. By forming the migration barrier as ahorizontally oriented layer, the migration barrier impedes the verticalmigration of the holes and thereby decreases the amount ofrecombination.

The properties of semiconductors such as silicon germanium that arebeneficial for improving charge retention in memory cells are alsouseful for implementing low voltage, low power memory cell programming.Specifically, the relatively narrow band gap of silicon germaniumenables devices fabricated with silicon germanium source/drain regionsto achieve adequate band-to-band tunneling at low voltages.

Referring now to the drawings, FIG. 1 is a partial cross-sectional viewof a semiconductor wafer 101 at an intermediate stage in the fabricationof a “high retention” integrated circuit 100 according to the presentinvention. In the depicted embodiment, wafer 101 includes asemiconductor layer 106 of a first semiconductor material overlying aburied dielectric layer 104 overlying a wafer bulk 102. The depictedimplementation includes a migration barrier layer 108 of a secondsemiconductor material overlying a semiconductor layer 106 and asemiconductor capping layer 110 of the first semiconductor materialoverlying migration barrier layer 108. The upper and lower boundaries ofmigration barrier layer 108 define a migration barrier. Isolationstructures 105 are located at either end of semiconductor layer 106 toprovide physical and electrical isolation between adjacent devices.Isolation structures 105 are preferably implemented as conventionalsilicon oxide, shallow trench isolation (STI) structures. Importantlyfor 1T memory cells, semiconductor layer 106 is an electrically isolated(floating) structure in which charge can be stored for an appreciableduration (limited primarily by the carrier lifetime).

In one embodiment, semiconductor layer 106 is crystalline silicon, whichmay be doped with an n-type or p-type impurity. Buried dielectric layer104 may be suitable implemented with a silicon-oxide compound, in whichcase buried dielectric layer 104 is also referred to as buried oxide(BOX) layer 104. Bulk 102 of wafer 101 may be crystalline silicon oranother semiconductor material exhibiting appropriate electrical andmechanical properties. Semiconductor layer 106, BOX layer 104, and bulk102 may all be provided in the wafer starting material (i.e., theselayers may be formed by a wafer supplier as part of the startingmaterial used by the device manufacturer). In other embodiments, BOXlayer 104 and semiconductor layer 106 may be fabricated by the devicemanufacturer as part of the device fabrication process.

Migration barrier layer 108, when located between semiconductor layer106 and capping layer 110, creates a potential well for majoritycarriers in wafer 101 that is conceptually depicted in FIG. 2. In thedepicted implementation, the band gap of the material used for migrationbarrier layer 108 is less than the band gap of the semiconductor layer106 (and semiconductor capping layer 110). In addition, the valenceenergy band of the material migration barrier material (e.g.,Si_(1-x)Ge_(x)) is at a greater potential than the valence energy bandof semiconductor layer 106 and semiconductor capping layer 110 (e.g.,Si). Because the Fermi level (E_(F)) is constant throughout theconductive wafer substrate and the conduction band edge (E_(C)) variesonly slightly due to the migration barrier, the band gap differential atequilibrium (no applied voltage) between semiconductor layer 106 andmigration barrier layer 108 produces a valence band offset 107 definedby the boundaries of migration barrier layer 108.

Valence band offset 107 creates a region that retains holes and therebyreduces migration. Because of the geometrical configuration of migrationbarrier layer 108 (a horizontally oriented layer) the valence bandoffset 107 impedes hole migration in the vertical direction (thedirection perpendicular to an upper surface of wafer 101). Holesgenerated in semiconductor layer 106 will, therefore, encounter abarrier to migrating to an upper surface of wafer 101. Becauserecombination centers are prevalent at the wafer upper surface,migration barrier layer 108 effectively reduces the rate ofrecombination by limiting the number of holes than can reach the mostefficient recombination centers.

The formation of migration barrier layer 108 and semiconductor cappinglayer 110 is an implementation detail. In one embodiment, epitaxialdeposition is used to grow a silicon germanium migration barrier layer108 on semiconductor layer 106 and a silicon semiconductor capping layer110 on migration barrier layer 108. In a preferred implementation of theepitaxial formation embodiment, the formation of migration barrier layer108 and semiconductor capping layer 110 is achieved in a singleepitaxial process step during which a germanium precursor is present inthe epitaxial chamber during formation of migration barrier layer 108.

The implementation described in the preceding paragraphs (where thebandgap of migration barrier layer 108 is less than the bandgap ofsemiconductor layer 106) is suitable for use with NMOS transistors(where holes are the majority carrier in the transistor channel body).In this implementation, semiconductor layer 106 is lightly doped p-typesilicon and migration barrier layer 108 is a narrow bandgap materialsuch as silicon germanium (Si_(1-x)Ge_(x)). For purposes of thisdisclosure, a narrow bandgap material is a material having a bandgapthat is less than the bandgap of silicon (approximately 1.12 eV at 300K).

Si_(1-x)Ge_(x) exhibits a bandgap that is intermediate between thebandgap of silicon and the bandgap of germanium (˜0.66 eV at 300 K)where the bandgap varies roughly linearly with the percentage ofgermanium in the alloy (Vegard's law). The germanium content ofmigration barrier layer 108 is preferably in the range of approximately15 to 55%. While silicon germanium has been used in MOS transistors toengineer stress differentials to improve carrier mobility, theprevailing implementation of such use is in conjunction with PMOStransistors, where the stress induced by SiGe improves hole mobility. Incontrast to those applications, Si_(1-x)Ge_(x) is used herein to reducethe recombination rate of electron-hole pairs in the channel region andthereby improve the retention time and increase the refresh period for1T memory cell arrays.

The described implementation uses NMOS transistors on p-type silicon anda narrow band gap material for migration barrier layer 108. The conceptof introducing a bandgap differential underlying the transistor channelto impede recombination by restricting vertical (and possibly lateral)migration of excess carriers is extensible, however, to otherimplementations. For example, an analogous recombination reductioneffect may be achieved for PMOS transistor implementations in whichsemiconductor layer 106 is n-type and the bandgap of migration barrierlayer 108 is less than that of layer 106 and the conduction energy bandof migration barrier layer 108 is lower than that of semiconductor layer106 (for example, a silicon carbon (SiC) layer 106 and a silicon layer108). In either the PMOS or NMOS implementations, the presence of thefirst and second semiconductor materials in proximity to each othercreates an energy band offset wherein the potential energy level ofmajority carriers in the second semiconductor, which in this example ismigration barrier layer 108, is lower than the potential energy level ofmajority carriers in the first semiconductor (capping layer 110 orsemiconductor layer 106. The potential energy level is the energy levelof (the valence band for p-type material where holes are the majoritycarrier and the conduction band for n-type material where electrons arethe majority carrier).

Referring now to FIG. 3, a gate dielectric 112 is formed overlyingsemiconductor capping layer 110. Embodiments using a siliconsemiconductor capping layer 110 may employ a traditional,thermally-formed silicon dioxide gate dielectric layer 112.Alternatively, gate dielectric layer 112 may include a deposited, high-kmaterial (a material having a dielectric constant greater than 4.0) suchas any of a variety of metal-oxide and metal-nitrido-oxide compounds.

Referring to FIG. 4, a transistor gate module 125 has been formed ongate dielectric 112. In the depicted embodiment, transistor gate module125 includes an electrically conductive gate electrode 120, a cappinglayer 121, and spacers 124 formed on sidewalls of gate electrode 120.Gate electrode 120 may be a traditional, doped polycrystalline silicon(polysilicon) gate electrode. Alternatively, gate electrode 120 mayinclude alternative gate materials such as various metal gate materialsincluding tantalum carbide (TaC), tantalum nitride (TaN) or titaniumnitride (TiN) that will be familiar to those skilled in the field ofsemiconductor fabrication. Capping layer 121 and spacers 124 may besilicon nitride, silicon oxide, or another electrically insulatingmaterial exhibiting good etch selectivity with respect to the materialof gate electrode 120. Formation of spacers 124 is preferably achievedin the conventional manner by depositing a conformal dielectric filmoverlying gate electrode 120 and wafer 101 and thereafter performing ananisotropic (dry) etch.

In a one-dimensional migration barrier embodiment, a transistor 127 ismade by forming source/drain regions 129. Formation of source/drainregions 129 includes conventional ion implantation of an appropriateimpurity (e.g., arsenic or phosphorous for NMOS transistors and boronfor PMOS transistors) using gate module 125 as an implant mask. In thisimplementation, source/drain regions 129 are self aligned to gate module125 and are laterally displaced within semiconductor layer 106 on eitherside of a channel body 111 of transistor 127. Channel body 111 extendslaterally between source/drain regions 129 and vertically from gatedielectric 112 to BOX layer 104. Source/drain regions 129 are indicatedwith dashed lines in FIG. 4 to convey their formation as optional. In atwo-dimensional migration barrier implementation described below withrespect to FIG. 5, source/drain formation is postponed.

Transistor 127 as depicted in FIG. 4 is suitable for reducingrecombination of holes because the location and orientation of migrationbarrier layer 108 retards the vertical migration of holes to thesubstrate surface, where recombination centers are likely to be numerousdue to the large number of surface states. Moreover, this migrationbarrier functionality is achieved with a minimum of additionalprocessing steps. Migration barrier layer 108 as depicted in FIG. 4 maybe referred to herein as a one dimensional barrier because it does notrestrict lateral migration of holes (migration in a plane parallel tothe wafer upper surface). Lateral migration of holes may result in anundesirably high recombination rate if migrating holes reach regions,such as the regions at the boundaries of implanted source/drain regions,where recombination centers are likely to be prevalent.

The embodiment depicted in FIG. 5 addresses the lateral migration issueby patterning migration barrier layer 108 (and capping layer 110) usinggate structure 125 as a mask to form a two-dimensional migration barrier109. Two dimensional migration barrier 109, in addition to limiting thevertical migration of majority carriers in transistor channel body 111,limits the lateral migration of channel body majority carriers to thelateral boundaries of migration barriers 109 (defined by the boundariesof gate structure 125). One can imagine an extension of the potentialwell diagram of FIG. 2 in which an analogous potential well is presentin the lateral direction defined by the lateral boundaries of migrationbarrier 109. In this implementation, hole migration is restricted inboth a vertical and a horizontal direction.

The patterning of migration barrier layer 108 as described in thepreceding paragraph thus represents a tradeoff between additionalcarrier migration reduction and additional processing. While theembodiment depicted in FIG. 5 incurs the additional processing requiredto pattern migration barrier 109 and to refill the resultingsource/drain recesses, other embodiments may elect to bypass theprocessing of FIG. 5 and use the migration barrier layer 108 of FIG. 4instead of the potential well structure 109 of FIG. 5 for hole migrationprevention. In the embodiment depicted in FIG. 5, formation of migrationbarrier 109 includes anisotropic etching through semiconductor cappinglayer 110 and migration barrier layer 108 to expose an upper surface ofsemiconductor layer 106.

Referring now to FIG. 6, source/drain structures 126 are formedoverlying the exposed portions of semiconductor layer 106. As suggestedby the name, source/drain structures 126 will be used for thesource/drain regions of a resulting transistor 130. Forming source/drainstructures 126 may include selective epitaxial growth of a silicon layerusing semiconductor layer 106 as a seed. In the embodiment depicted inFIG. 6, source/drain structures 126 are elevated source/drain structureshaving an upper surface above the interface between gate dielectric 112and the underlying substrate (e.g., semiconductor capping layer 110).

A source/drain implant (not depicted) may follow formation ofsource/drain structures 126 to complete the formation of a transistor130 that includes two-dimensional migration barrier 109. In anotherembodiment, structures 126 may be in-situ doped during the selectiveepitaxy process. In one embodiment, transistor 130 is an NMOS transistorin which transistor channel body 111 is a p-type region and source/drainstructures 126 are n-type. In this embodiment, the energy band alignmentbetween migration barrier 109 and the adjacent structures (semiconductorlayer 106, capping layer 110, and source/drain structures 126) and thegeometrical configuration of migration barrier 109 restrict holesgenerated in channel body portion 111 from migrating vertically torecombination centers at the wafer upper surface and from migratinglaterally to recombination centers at the boundaries of source/drainstructures 126. By restricting migration to regions where recombinationcenters are prevalent, transistor 130 exhibits improved carrier lifetimeand thereby functions more efficiently as a storage cell.

Referring now to FIG. 7, an alternative implementation of the inventionis depicted in which the starting material for wafer 101 includes asemiconductor layer 106 of a first semiconductor material such assilicon germanium (Si_(1-x)Ge_(x)). A thin dielectric layer 131, whichmay be silicon oxide, silicon nitride, or the like, is formed oversemiconductor layer 106. Dielectric layer 131 and semiconductor layer106 are then etched or otherwise patterned as shown in FIG. 8 to removeperipheral portions of layer 106 and form semiconductor structure 136.Semiconductor structure 136 is positioned to align with a subsequentlyformed transistor gate module. In the depicted embodiment, theperipheral portions of semiconductor layer 106 are completely removed soas to expose the underlying BOX layer 104. In another embodiment (notshown in FIG. 8), the etch is stopped before BOX layer 104 is exposed sothat a thin layer of semiconductor layer 106 remains in the peripheralportions. This remnant layer may provide a better seed surface for asubsequent selective epitaxy process.

In FIG. 9, semiconductor structures 132 of a second semiconductormaterial have been formed adjacent semiconductor structure 136. In oneembodiment semiconductor structures 132 are silicon structures formed byselective epitaxial growth, CVD, or a combination thereof. Semiconductorstructures 132 may be doped (in situ or implanted) or undoped siliconstructures. In an embodiment suitable for use with NMOS transistors,semiconductor structures 132 are preferably doped n-type. In oneembodiment, formation of semiconductor structures 132 includes achemical mechanical polish (CMP) process or other suitable planarizationprocess to produce a planar upper surface between structures 136 and132. Thereafter, as depicted in FIG. 9, a capping layer 134 may beformed overlying semiconductor structures 132 and 136. Capping layer 134is preferably comprised of the same semiconductor material as structures132. In implementations where the semiconductor material of structures132 is silicon, capping layer 134 is preferably crystalline siliconformed by epitaxial growth. In this embodiment, capping layer 134 notonly provides a boundary for a majority carrier potential well(described below), it also facilitates integration with subsequentprocessing steps, such as the gate dielectric and gate module formationsteps, that are typically performed upon silicon.

In contrast to the one-dimensional migration barrier layer 108 (of FIG.4), the embodiment depicted in FIG. 9 includes a two-dimensionalpotential well for majority carriers. Whereas the implementationdepicted in FIG. 4 constrains majority carrier movement in one dimension(the vertical direction), the implementation depicted in FIG. 9constrains majority carrier movement in two dimensions or directions.The valence band offset between material 134 and 136 constrains holemovement in the vertical direction (analogous to the valence band offsetdepicted in FIG. 2). In addition, however, the valence band offsetbetween semiconductor structures 132 (e.g., silicon) and semiconductorstructure 136 (e.g., Si_(1-x)Ge_(x)) constrains majority carriermigration in a lateral direction. The lower barrier is formed by thevalence band offset between 136 and the dielectric 104.

As depicted in FIG. 10, processing subsequent to that depicted in FIG. 9includes forming a gate module 135 similar to gate module 125 of FIG. 6where gate module 135 is laterally aligned with the boundaries ofsilicon germanium structure 136. After source/drain processing (notdepicted), the resulting transistor 140 includes a silicon germaniumstructure 136 that extends downward vertically all the way to BOX layer104 and silicon semiconductor structures 132 disposed on either side ofsilicon germanium structure 136.

Referring to FIG. 11, another embodiment of a processing sequencesuitable for forming a high retention transistor includes forming a void142 in semiconductor layer 106 of wafer 101. In this embodiment,semiconductor layer 106 is preferably silicon and void 142 is located ina region where a silicon germanium structure will be formedsubsequently. The formation of void 142 may include “dummy gate”processing in which the wafer is patterned using a gate mask or theobverse of a gate mask to expose the region of semiconductor structure106 where a gate module will be formed. Void 142 is then created usingconventional silicon etch. In the depicted embodiment, void 142 extendsentirely through semiconductor layer 106 to expose the underlying BOXlayer 104. In another embodiment (not depicted), void 142 does notextend entirely through semiconductor layer 106, leaving a thin layer ofsemiconductor layer 106 just sufficient to cover BOX layer 104. Thisembodiment may be preferred to provide a better seed layer for asubsequent epitaxy refill process.

In FIG. 12, a silicon germanium structure 144 is formed in the void 142between semiconductor structures 106 and planarized. A capping layer146, preferably of silicon, is then formed overlying structures 106 and144. In FIG. 13, a gate module 155 is formed overlying silicon germaniumstructure 144 to form a high retention transistor 160 that isstructurally equivalent to transistor 140 of FIG. 10.

Referring now to FIG. 14, another embodiment of the invention creates apotential well in the transistor channel of a vertical, double gatedtransistor. Vertical, double-gate transistors are known in the field ofsemiconductor fabrication. Vertical, double gated transistors may beused for 1T memory cells if the two gates are independent. See, e.g., C.Kuo, T.-J. King, and C. Hu, A Capacitorless Double Gated DRAM Cell, IEEEElectron Device Letters Vol. 23 No. 6 pp. 345-347 (June 2002). Theprocessing depicted in FIG. 14 through FIG. 16 is suitable forfabricating a vertical, double gated, 1T memory cell exhibiting highretention characteristics. In FIG. 14, the wafer 101 includes asemiconductor layer 176 over a BOX layer 104. A migration barrier layer178 is formed over semiconductor layer 176 and a second semiconductorlayer 180 is formed over migration barrier layer 178. Layers 176 and 178may be formed by CVD or epitaxial growth analogous to the formation oflayers 110 and 112 shown in FIG. 1.

In FIG. 15, layers 176, 178, and 180 are patterned to form a fin 175using conventional photolithography and etch processing. In addition,the depicted implementation shows an optional epitaxial layer 181 formedon exterior surfaces of fin 175. In this embodiment, the epitaxial layer181 may be a silicon layer that functions in a manner analogous to thecapping layer 110 depicted in FIGS. 1 through 6. In FIG. 16, gatedielectric layers 182 are then formed on sidewalls of fin 175 andconductive spacers 184 formed adjacent dielectric layer 182. Theconductive spacers act as independent gate electrodes for the resultingtransistor 170. In this transistor, layers 176 and 180 serve as thetransistor's source and drain terminals. The presence of migrationbarrier layer 178 between layers 176 and 180 reduces the amount ofmigration and results in lower recombination and higher retention.

In addition to providing improved retention time, the relatively narrowbandgap of silicon germanium offers the potential to improve anothercharacteristic of 1T memory cells. Two primary mechanisms are employedto program (write) a 1T memory cell, namely, impact ionization andband-to-band tunneling. Impact ionization is performed by biasing anNMOS transistor to an ON state (i.e., V_(GS)>V_(T)) and applying asufficiently large positive drain voltage (e.g., V_(DS)=1.8V or higher).Band-to-band tunneling is performed by biasing the gate electrode to asufficiently negative voltage while simultaneously biasing the drainterminal to a sufficiently large positive voltage. The very highelectric field in the vicinity where the gate electrode overlaps thesource/drain structure produces a tunneling that creates electron-holepairs.

Programming methods that employ tunneling consume less power than impactionization methods because the transistor is biased to an off stateduring tunneling. However, the biasing conditions necessary to achievetunneling are problematic because special circuits are required togenerate the relatively high programming voltages. Lower programmingvoltages are always preferable to higher programming voltages innonvolatile memory devices. The present invention makes use of thenarrow bandgap of a material such as silicon germanium to achieve lowerbiasing voltages for band to band tunneling in a 1T memory cell. In oneembodiment, the beneficial effect of low voltage programming is coupledwith the improved charge retention described in the precedingparagraphs.

Referring to FIG. 17, the starting material (wafer) 101 for implementingone embodiment of a reduced bandgap tunneling technique is substantiallythe same as the wafer 101 depicted in FIG. 1 with a reduced bandgaplayer 208 overlying a semiconductor layer 106 and a capping layer 210overlying reduced bandgap layer 208. Reduced bandgap layer 208 is of amaterial (e.g., silicon germanium) having a bandgap that is less thanthe bandgap of the material (e.g., silicon) of semiconductor layer 106and capping layer 210.

In FIG. 18, a gate module 225 is formed overlying a gate dielectric 212.Gate module 225 includes a gate electrode 220 and sidewall spacers 224.After completion of gate module 225, source/drain regions 202 are formedin semiconductor layer 106 laterally disposed on either side (selfaligned to) gate module 225. Source/drain regions 202 are preferablycreated by implanting an impurity species into the regions. In oneembodiment, the source/drain regions 202 are heavily doped n-typeregions suitable for use as NMOS transistors source/drain electrodes.

The presence of reduced bandgap layer 208 with source/drain regions 202and in close proximity to the gate electrode 120 of gate module 225facilitates tunneling at relatively low biasing conditions. In oneembodiment, for example, adequate tunneling is achievable by biasing oneof the source/drain regions to approximately 1.2 V, grounding the othersource/drain region and biasing the gate electrode 120 to approximately−1.2V. This biasing represents a 30% improvement (reduction) inconventional biasing necessary to induce band to band tunneling.

A second embodiment of the reduced bandgap tunneling technique isdepicted with respect to FIG. 19 through FIG. 24. In this processingsequence, gate electrode 120 has been formed overlying a gate dielectriclayer 212 overlying a semiconductor layer 106. Wafer 101 as depicted inFIG. 19 does not include additional layers over semiconductor layer 106.

Following formation of gate electrode 120, an extension ion implantation(represented by reference number 230) is performed to create extensionimplant regions 232 in an upper portion of wafer 101 self-aligned togate electrode 120. The extension implant 230 is used in this embodimentto create a region of semiconductor layer 106 that etches quickly withrespect to the undoped portions of semiconductor layer 106. Suitablespecies for implant 230 include arsenic, phosphorous, and various otherelements.

In FIG. 20, a silicon etch is performed to remove selectively theextension region portions of semiconductor layer 106. Selective removalof regions 232 results in the formation of voids 234 in wafer 101. Theselective removal of regions 232 is facilitated by the different dopinglevels within semiconductor layer 106 with lightly doped or undopedregion 106 etching substantially more slowly than extension regions 232.

Referring to FIG. 21, source/drain structures 236 are formed in wafer101 where the voids 234 were located in FIG. 20. Importantly, thesource/drain structures 236 depicted in FIG. 21 include a first region235 of a material having a first bandgap and a second region 237 of amaterial having a second bandgap that is less than the first bandgap. Inone implementation, first region 235 is an n-type silicon region andsecond region 237 is an n+ silicon germanium region.

In this embodiment, the silicon first region 235 of source/drainstructures 236 provides the extension region under normal bias (readconditions). During high field programming operations (with the drainvoltage at a large positive voltage for NMOS), the depletion region willextend through a portion 239 of silicon first region 235 adjacent thetransistor channel so that the low bandgap region 237 will be under biassuch that it provides enhanced electron-hole generation. To facilitatethis operation, silicon only region 235 is preferably thin and having anintermediate doping level (e.g., 5 nm thick and an impurityconcentration of ˜1e18 cm⁻³).

Source/drain regions 236 may be formed by growing the first region 235using a selective silicon epitaxy process and then growing second region237 using selective n+ silicon germanium epitaxy. In FIG. 22, anotherextension implant (238) is performed to achieve the desired doping ofsecond region 237 if additional doping is desired. It will beappreciated that there are many techniques that can be used tofacilitate the forming of the offset between first and second regions235 and 237, such as the use of multiple spacers together with selectiveepitaxial growth and implantation. The resulting doped source/drainstructures are identified in FIG. 22 by reference numeral 236, whichincludes a silicon only region, 235, and a lower bandgap region 237.Regions 237 may be also grown higher than a primary surface of thedevice (the upper surface of semiconductor layer 106) to produceelevated source/drain structures analogous to source/drain structures126 depicted in FIG. 6.

Referring to FIG. 23, spacers 240 are formed on sidewalls of gateelectrode 120 to form gate module 241. Thereafter, a source/drainimplant (not shown) is performed to form source/drain regions 242 insemiconductor layer 106 of a transistor 250. The presence of a lowbandgap source/drain 237 in such close proximity to gate electrode 120facilitates band to band tunneling programming of transistor 250.

In the foregoing specification, the invention has been described withreference to specific embodiments. However, one of ordinary skill in theart appreciates that various modifications and changes can be madewithout departing from the scope of the present invention as set forthin the claims below. The specification and figures are to be regarded inan illustrative rather than a restrictive sense, and all suchmodifications are intended to be included within the scope of presentinvention.

Benefits, other advantages, and solutions to problems have beendescribed above with regard to specific embodiments. However, thebenefits, advantages, solutions to problems, and any element(s) that maycause any benefit, advantage, or solution to occur or become morepronounced are not to be construed as a critical, required, or essentialfeature or element of any or all the claims. As used herein, the terms“comprises,” “comprising,” or any other variation thereof, are intendedto cover a non-exclusive inclusion, such that a process, method,article, or apparatus that comprises a list of elements does not includeonly those elements but may include other elements not expressly listedor inherent to such process, method, article, or apparatus.

1. A transistor, comprising: a gate electrode in contact with a gatedielectric; source/drain regions of a first semiconductor; and a channelbody intermediate between the source/drain regions and including asurface adjacent the gate dielectric wherein the body portion includes amajority carrier migration barrier of a second semiconductor wherein themigration barrier limits migration of majority carriers in the channelbody to the surface of the channel body.
 2. The transistor of claim 1,wherein the migration barrier further limits migration of majoritycarrier in the channel body from migrating to the source/drain regions.2. (canceled)
 3. The transistor of claim 1, wherein a capping layer ofthe first semiconductor is located between the migration barrier and thegate dielectric.
 4. The transistor of claim 3, wherein the source/drainregions are n-type regions and the body portion is a p-type region andfurther wherein the first semiconductor is silicon and the secondsemiconductor is silicon germanium.
 5. The transistor of claim 4,wherein a germanium concentration of the silicon germanium is in therange of approximately 15 to 50%.
 6. The transistor of claim 1, whereinthe source/drain regions and the channel body comprise a fin overlying aburied oxide layer and wherein conductive spacers formed adjacentsidewalls of the gate electrode serve as the gate electrode.
 7. Thetransistor of claim 1, wherein the migration barrier comprises a layerof the second semiconductor displaced below the gate electrode.
 8. Thetransistor of claim 7, wherein the migration barrier extends laterallyinto the source/drain regions.
 9. The transistor of claim 7, wherein themigration barrier terminates laterally at the source/drain extensionregions. 10-20. (canceled)
 21. The transistor of claim 1, wherein thepresence of the migration barrier in the channel body creates an energyband offset between the first and second semiconductors.